Cleanroom Fabrication and Foundry
Integrated Systems Nanofabrication Cleanroom
The Integrated Systems Nanofabrication Cleanroom (ISNC) is a shared-use clean-room that provides state-of-the-art equipment, facilities, and technical expertise for fabricating the most demanding nano-scale structures and devices. The ISNC was created to support all aspects of nanofabrication-related research and to advance research and learning in nano-science.
The ISNC provides open-access of resources to all members and welcomes both academic and non-academic members equally. The ISNC staff has deep knowledge of fabrication techniques and has exten-sive experience with academic and commercial R&D projects. No fabrication experience is needed to become a member of the facility; our knowledge-able staff can train and guide new members working in the facility as well perform remote processing for members who cannot travel to the facility.
The ISNC facility consists of 9700 square ft of class 100 and class 1000 cleanroom space and offers processing equipment with a broad range of capabilities including working with substrate sizes from pieces to 150mm wafers.
- ISNC is currently the only fully-equipped clean room for R&D locally