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Metal Etch – ULVAC 550

Dry Etch, Equipment
  • Standard Metal, III-V, & Silicide Etch
  • Etch Gasses: CI, CHI3, H2
  • Heated Chuck
Skills

Posted on

March 14, 2019

← Down Stream and Barrel Ashers- Matrix 105 & Brason Fluorine RIE -Oxford 80 Plus →

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