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Fluorine RIE -Oxford 80 Plus

by kbair | Mar 14, 2019 | 0 comments

Oxide, Nitritde, & Silicon Etch Etch Gasses: SF6, CF4, CHF3

Metal Etch – ULVAC 550

by kbair | Mar 14, 2019 | 0 comments

Standard Metal, III-V, & Silicide Etch Etch Gasses: CI, CHI3, H2 Heated Chuck

Down Stream and Barrel Ashers- Matrix 105 & Brason

by kbair | Mar 14, 2019 | 0 comments

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