Integrated Systems Nanofabrication Cleanroom
  • Become a User
  • Equipment and Services
  • Team
  • Tech Centers
    • Advanced Light Microscopy and Spectroscopy Laboratory (ALMS)
    • Electron Imaging Center for NanoMachines (EICN)
    • Integrated NanoMaterials Laboratory (INML)
    • Molecular Screening Shared Resource (MSSR)
    • Nano and Pico Characterization Laboratory (NPC)
  • CNSI Home
Select Page

Fluorine RIE -Oxford 80 Plus

by kbair | Mar 14, 2019 | 0 comments

Oxide, Nitritde, & Silicon Etch Etch Gasses: SF6, CF4, CHF3

Metal Etch – ULVAC 550

by kbair | Mar 14, 2019 | 0 comments

Standard Metal, III-V, & Silicide Etch Etch Gasses: CI, CHI3, H2 Heated Chuck

Down Stream and Barrel Ashers- Matrix 105 & Brason

by kbair | Mar 14, 2019 | 0 comments

Recent Comments

    Archives

    Categories

    • No categories

    Meta

    • Log in
    • Entries feed
    • Comments feed
    • WordPress.org

    CNSI at UCLA

    570 Westwood Plaza
    Building 114 | Mail Code: 722710
    Los Angeles, CA 90095
    Tel: (310) 267-4838
    Fax: (310) 267-4918

    Quick Links

    CLMS Login
    Video Archive
    For Members

    Social Media

       Copyright © 2019 California NanoSystems Institute