Integrated Systems Nanofabrication Cleanroom

Fabricating the most demanding nanoscale structures and devices

Integrated Systems Nanofabrication Cleanroom(ISNC) Personnel

Members

Krissy Do

Assistant Development Engineer
krissydo@cnsi.ucla.edu
(310)-983-3253

Krissy Do (B.S.) serves as a Assistant Development Engineer responsible for both administrative and technical tasks. Her administrative responsibilities include billing, management of student workers, day today clean room operations, supply inventory management and safety protocol training for new users. Krissy supports the SVG track coater, furnaces, etc. as well as metallization and metrology services.

Yuwei Fan

Senior Development Engineer
fan@cnsi.ucla.edu
(310)-983-3257

YUWEI FAN (Ph.D.) serves as a Senior Development Engineer responsible for electron beam lithography tools, Scanning Electron Microscopy(SEM),Atomic Force Microscopy(AFM) as well as maskless lithography. Yuwei came to UCLA in 2006 with over 15 years of experience in microelectronics, material science, and nanofabrication, which has enabled her to support the ISNC user community in since 2010.

Yousheng (Wilson) Lin

Technical Director
yousheng@seas.ucla.edu
(310)-206-8923

YOU-SHENG (WILSON) LIN (Ph.D.) serves as ISNC Technical Director as well as Lab Manager of the Nanoelectronics Research Facility in the Henry Samueli School of Engineering and Applied Sciences. Since joining the ISNC team in 2015 and based on 20 years of experience in nanofabrication, Wilson oversees operations of the cleanroom facility, provides consultation services for prospective users, and pursues funding opportunities for new instrument acquisitions.

Adam Stieg

Interim Director
stieg@cnsi.ucla.edu
(310)-206-2902

ADAM STIEG (Ph.D.) serves as the CNSI Associate Director -Technology Centers, Director of the Nano and Pico Characterization Laboratory and Interim Director of the ISNC. Adam is responsible for development and implementation of operational models that effectively utilize institutional resources; providing counsel on behalf of the Technology Centers to the CNSI Director; serving as a liaison to CNSI Members; and representing the Technology Centers at symposia, conferences and meetings.

Lorna Tokunaga

Senior Development Engineer
lornat@cnsi.ucla.edu
(310)-983-3413

LORNA TOKUNAGA (M.S.) serves as a Senior Development Engineer responsible for the ASML Stepper, Tystar furnaces, wet processing, operations/safety documentation, foundry project management and 2nd shift staff coverage. Lorna came to UCLA with over 30 years of industry experience (Xerox Corp, TRW Inc, International Rectifier Corp) as a process engineer/manager for atmospheric and LPCVD Furnaces, PECVD&epitaxial silicon deposition and process development prior to joining the ISNC team in 2009.

Tony Wright

Assistant Development Engineer
tonywright@seas.ucla.edu
(310)-983-1182

TONY WRIGHT serves as an Assistant Development Engineer responsible for the maintenance, installation and repair of process equipment and facilities. Additionally, Tony provides training and user assistance on metallization and etching tools. Tony came to UCLA with over 30 years of experience in industry(TRW, M/A-Com, Electromask) prior to joining the ISNC team in 2011.